ГОСТ Р ИСО 14644-3-2020. Национальный стандарт Российской Федерации. Чистые помещения и связанные с ними контролируемые среды. Часть 3. Методы испытаний

[1]

ISO 14644-1:2015

Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration

[2]

ISO 14644-2

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

[3]

ISO 14644-4

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up

[4]

ISO 14644-7:2004

Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)

[5]

ISO 14644-8

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)

[6]

ISO 14644-9

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration

[7]

ISO 14644-10

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

[8]

ISO 14644-12

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

[9]

ASME N510-1989

Testing of Nuclear Air-Treatment Systems

[10]

ASTM F24-00

Standard Method for Measuring and Counting Particulate Contamination on Surfaces

[11]

ASTM F50-92

Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instrument Capable of Detecting Single Sub-Micrometre and Larger Particles

[12]

ASTM F312-97

Standard Test Methods for Microscopical Sizing and Counting Particles from Aerospace Fluids on Membrane Filters

[13]

ASTM F1471-93

Standard Test Method for Air Cleaning Performance of a High-Efficiency Particulate Air-Filter System

[14]

Chemical Abstracts Service Registry, Columbus, Ohio, US: American Chemical Society

[15]

EN 1822-2

High efficiency air filters (HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics

[16]

EN 1822-4

High efficiency air filters (HEPA and ULPA) - Part 4: Determining leakage of filter element (scan method)

[17]

IEST-RP-CC001 6:2016

HEPA and ULPA Filters

[18]

IEST-RP-CC006 3:2004

Testing Cleanrooms

[19]

IEST-RP-CC007 3:2016

Testing ULPA Filters

[20]

IEST-RP-CC021 4:2016

Testing HEPA and ULPA Filter Media

[21]

IEST-RP-CC034 4:2016

HEPA and ULPA Filter Leak Tests

[22]

ISO 5167-2

Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full - Part 2: Orifice plates

[23]

ISO 5167-4

Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full - Part 4: Venturi tubes

[24]

ISO 5167-5

Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full - Part 5: Cone meters

[25]

No JACA 24:1989

Standardization and Evaluation of Clean Room Facilities

[26]

JIS B 9921

Light scattering automatic particle counter. Japanese Industrial Standards Committee

[27]

SEMI E14-93

Measurement of particle contamination contributed to the product from the process or support tool

[28]

ISO 7726

Ergonomics of the thermal environment - Instruments for measuring physical quantities

[29]

Evaluation of measurement data - Guide to the expression of the expression of uncertainty in measurement, JCGM 100:200, corrected version 2010, (GUM)

УДК 543.275.083:628.511:006.354

ОКС 13.040.35

19.020

Ключевые слова: чистые помещения, контролируемые среды, частица, испытания, классификация чистоты, счетчик частиц